Laboratory compact sliding horizontal CVD tube furnace with digital gauge and vacuum pump CY-O1200-60IT manufacturer from China Zhengzhou CY Scientific Instrument Co., Ltd.

Laboratory compact sliding horizontal CVD tube furnace with digital gauge and vacuum pump

Price:	1000.0 USD
Payment Terms:	T/T,L/C,D/A
Place of Origin:	Henan, China (Mainland)


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Product Detail

Model No.: CY-O1200-60IT

Production Capacity: 50

Delivery Date: within 7 days

Means of Transport: Ocean

Packing: PLY wood box, or as custome...

Brand Name: CY

Rapid Thermal Annealing furnace/RTA tube furnace is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system w

Furnace parameters	Furnace Construction	•High purity ceramic fiber insulation (energy saving 30% and weight lighter about 30% than old furnace ). • Double layers steel casing with fan cooling, to ensure the surface of furnace below 50 °C. • Perfect sealing stainless steel flange with block.
	Chamber Size	Φ501000mm, Φ601000mm,Φ801000mm,Φ1001000mm or as customized
	Power	0.8KW ~10KW, base on the heating zone length
	Voltage	AC 110V or AC 220V 50/60 Hz (please tell us when your place order.)
	Max. Temperature	1200 °C (< 2 hour)
	Continuous Work Temp.	1150 °C
	Max. Heating Rate	20 °C /min
	Temperature Controller	• PID automatic control and auto-tune function. • 30 programmable segments for precise control. • Over-heated and broken Thermal couple. • Digital control panel LED button or LCD touch screen
	Temperature Accuracy	+/- 1 °C
	Heating Element	Aludirome
	Thermal Couple	K type
Plasma RF generator	l Output Power: 5 -300W adjustable with ±1% stability l RF frequency: 13.56 MHz 0.005% stability l Reflection Power: 200W max. l Matching: Automatic l RF Output Port: 50 Ω, N-type, female l Noise: <50 dB. l Cooling: Air cooling. (water cooling is available upon request, and a water chiller can be ordered seperately) l Power : 208-240VAC, 50/60Hz
Vacuum Pump	l AC 220V 50 Hz 1/2HP 375W l 2 Liter /S or 120 liter/m l Oil trap (inlet) and exhaust filter (outlet) are installed. l Max. vacuum: 10-2 torr l Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge. It controls pressure range from 10^-6 torr ~ 760 torr.